We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting In P laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of 1 μm onto a silicon planar lightwave circuit chip The chip is 2.3 mm × 1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. Thus, this micro-encoder satisfies the market requirements for practical use.
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