Maskless laser patterning of insulating films from salt solutions

摘要

Insulating thinhyphen;film patterns have been deposited on a variety of metal surfaces using focused laser light incident on samples submerged in both electrolytic and electroless nickel solutions. Deposits occur only where the laser radiation is absorbed by the substrate. For a single scan, the patterned film can have dimensions as small as 25 nm in height, 4 mgr;m in width. Scanning electron microscope and electrical probing measurements confirm the insulating nature of the films. thinsp;