80-channel MEMS optical switch using a comb-driven actuator

摘要

An 80-channel 3D-MEMS low drive-voltage optical switch module has been developed. A dual-axis vertical comb-drive MBMS micromirror with V-shaped torsion bars enabled 5-degrees rotation by applying 60-volts to it. Insertion loss of less than 5 dB and optical switching time of 1 ms was obtained using a roof-type folding mirror configuration and a control circuit with a digital filer and block drive control.