Using molecular beam epitaxy, we have successfully prepared PrBa2Cu3Oy(PBCO) films and PBCO/YBa2Cu3Oy(YBCO) layered structures. Epitaxial growth of these films was confirmed byinsitureflection highhyphen;energy electron diffraction. The temperature dependence of resistivity in the PBCO film showed semiconducting behavior. The lattice parameters of Pr1+xBa2minus;xCu3Oyfilms decreased whenxincreased and almost coincided with that of wellhyphen;oxidized YBa2Cu3Oyfilms (ysim;7) whenxsim;0.3. These experimental results indicate that YBCO/PBCO/YBCO multilayers are suitable for artificial layered structures of oxide superconductors, i.e., electronic devices.
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