Effect of a magnetic filter on the formation and deposition of highhyphen;Zimpurities in a multicusp ion source

摘要

The presence of a magnetic filter in a multicusp ion source reduces the transport of tungsten to the extractor region by forming a uniform plasma potential region in the source chamber. Because of the reduced numbers of primary electrons in the extraction chamber, the plasma grid floats near the plasma potential and this reduces the amount of impurity ions formed from sputtered grid material.