Semiconductor production has become a major industry in Taiwan. Consequently, the effect of pollutants on human health and air quality are growing. Within semiconductor fabs, process exhaust systems serve to eliminate excess heat, toxic gases, acidic gases, organic solvent vapors, etc., produced by equipment. Sources of such pollutants are becoming more diverse and, because the discharged pollutants are dispersed throughout the vicinity via convection and diffusion, the effects are becoming more severe.
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