Design for Automation: Its Time Has Finally Come

摘要

For years, everyone has talked about "designing for automation" but no one has done anything about it, to paraphrase Will Rogers' famous line about the weather. That is about to change now as the stringent requirements of the transition to 300 mm wafers forces the architects of fabs as well as makers of the equipment that goes into them to accept the reality that true factory-wide automation is coming at last.