Catalytic technology for PFC emissions control

摘要

A PFC abatement unit employing the catalyst described herein was constructed by Guild Associates Inc. and evaluated 14. The system was able to achieve >99 destruction of CF{sub}4 and C{sub}2F{sub}6, and >95 destruction of c-C{sub}4F{sub}8 throughout the duration of the test (>50,000 wafers processed). Cost of ownership is estimated to be