STRUCTURE-THERMAL PROPERTIES RELATIONSHIP IN VOLATILE HETEROMETALLIC COMPLEXES USED IN CVD OF Cu-Pt AND Cu-Pd FILMS

摘要

The structure and thermal properties of a new heterometallic complex based on copper and noble metal beta-diketonates are described: Cu(hfa)(2) *center dot PtL2F (hfa = 1,1,1,5,5,5-hexafluoropentane-2,4-dionato, L-F = 1,1,1-trifluoro-5-methoxy-5-methyl-hexane-2,4-dionato). According to the single crystal X-ray diffraction data, the synthesized complex represents a 1D coordination polymer completely sublimed at T = 90 degrees C and P = 10(-2) Torr, T-melt = 149 degrees C. The thermal stability of the complex is analyzed by thermogravimetry and differential scanning calorimetry. The correlation between the thermal stability and the complex and the structural data together with the results of quantum chemical calculations is discussed. The crystal structures, thermal properties, and features of the electronic structure of the Cu-Pt complex and the isoligand Cu-Pd complex Cu(hfa)(2) *center dot PtL2F are compared for their further use as precursors in the co-deposition of coatings from binary and ternary alloys.