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MAKINGTHE MOST OF YOUR ULTRAPURE WATER SYSTEM

机译:MAKINGTHE MOST OF YOUR ULTRAPURE WATER SYSTEM

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Did you know that the typical production of semiconductor wafers requires the same amount of water as a town with a population of 20,000 people every day? Semiconductor manufacturing uses an ample amount of ultrapure water. Accordingto the International Technology Roadmap for Semiconductors (ITRS) (2011), each wafer needs 7 litres/cm~2 of ultrapure water to be produced. So in a typical production of 20,000 wafers per month, up to 3,000 m~3 of ultrapure water can be used per day. That is equivalent to the daily water requirements of a town with a population of 20,000 people.

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    《Cleanroom technology 》 |2021年第8期| 43-45| 共3页
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