The following presents a concise summary of one or more embodiments in order to provide a basic understanding of the present invention. This summary is not an extensive overview of all contemplated embodiments and is not intended to identify key or critical elements of all embodiments nor delineate the scope of any or all embodiments. Its sole purpose is to present some concepts relating to one or more embodiments in a succinct form as a prelude to the more detailed description that is presented later. According to one aspect of an embodiment, an arrangement enables in situ substitution of tools such as stones by having an in-system" utility stage designed to transport objects in addition to wafers for processing. Here and elsewhere, the term "in-system" is used to mean that the device or function referred to is one that operates without having to open an enclosure containing the wafer tables. According to another aspect of an embodiment, a variety of tools may be stored in-system in a tool store, with the utility stage being capable of retrieving tools from the tool store and loading the tools into a utility device such as an in-system cleaner. 45-46 Verwendung von polymeren Aziridinen in w?ssrigen Formulierungen Bisher werden monomere Aziridine in Zweikomponenten-Formulierungen auf Basis von Polyurethanen und/oder Acrvlaten als Vernetzer eingesetzt. Verwendung finden sie in Papierbeschichtungen, Primer von Kunststoffolien und Siebdruckfarben ect.
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