Stand for Experimentally Studying Local Parameters of Chemically Active Induction Discharge Plasma

摘要

An experimental stand for studying the local parameters of a chemically active plasma of an induction discharge maintained at low pressure is described. Taking into account the limitations caused by the peculiarities of working with chemically aggressive media, a method is proposed for changing the spatially localized plasma parameters of the discharge using "fast" electrical probes. Methods for improving the accuracy of probe methods and smoothing the experimental current-voltage characteristics are considered.