An attempt has been made to measure the microscopic distribution of carbon concentration and to analyze the results using a soft X-ray emission spectroscopy analyzer installed in a scanning electron microscope. The obstacle to accomplishing this was the organic substances adhering to the sample surfaces and acting as contaminants. However, a technique has been established for analyzing while removing contamination by gas-cluster ion beam irradiation, which has enabled carbon distribution measurement focusing on the micros tructure in steel. It has also been suggested that this technique may be used for the analysis of the binding state of carbon contained in steel.
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