Stabilization of the optical parameters of filters based on amorphous silicon

摘要

It is established that the annealing of finished filters fabricated on the basis of the amorphous-silicon-quartz pair makes it possible to completely stabilize their optical parameters. When the filters are annealed in air, the transmission band shifts slightly toward shorter wavelengths, and the maximum transmittance increases because of an increase of the homogeneity of the films. Our calculations showed that the main chanoes occur in the quartz films. (C) 2004 Optical Society of America.