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机译:Atomic-Level Insight into the Formation of Subsurface Dislocation Layer and Its Effect on Mechanical Properties During Ultrafast Laser Micro/Nano Fabrication
Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China;
atomic structure; mechanical properties; micro; nano processing; subsurface dislocation layer; ultrafast laser;