Abstract In this study, plasma‐enhanced chemical vapor deposition of cyclohexane thin films was prepared for application towards ethanol and ammonia vapor sensing between the range 100 and 1,000 ppm. The deposited film exhibited stable, uniform coating and smooth surface morphology with minor surface roughness. The thickness of the coatings was 40–46 nm. The gas‐sensing behavior against the experimental parameters such as coating thickness, operating temperature, and gas concentration was investigated. It was noted that increasing the coating thickness reduced the sensor's electrical conductivity. Increment in the operating temperature from 75°C to 100°C increased the sensor performance linearly. The ethanol and ammonia concentration effects were mainly influenced by the above two factors. The results demonstrated that the cyclohexane thin films can be used to fabricate low‐cost gas sensors in addition to its conventional use as a low dielectric material.
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