Elastichyphen;surfacehyphen;wave temperature coefficients of delay line with ZnO thin film

摘要

The elastic‐surface‐wave device with a zero first‐order temperature coefficient has been fabricated on Pyrex glass by use of a ZnO thin‐film overlay. The second‐order temperature coefficient of ZnO/Pyrex glass was about 1.24 times as much as that of ST‐cut quartz and was similar in sign. It is shown theoretically that the dispersion is very low at a ZnO film thickness ofhK∼1.7, which gives a zero first‐order temperature coefficient.