Hydrogen sulfide sensor based on tin oxide deposited by spray pyrolysis and microwave plasma chemical vapor deposition

摘要

Spray pyrolysis and microwave plasma chemical vapor deposition techniques have been employed successfully for the deposition of CuO impregnated SnO2films suitable for sensing hydrogen sulfide and methyl mercaptan. The observed change in conductivity of these films upon exposure to H2S gas in air has been explained on the basis of the band theory of solids.