Measuring and quantifying static charge in cleanrooms and process tools

摘要

Static electricity has become a growing obstacle to efficient, high-technology manufacturing, particularly in the semiconductor, disk drive, and flat panel display industries. Smaller feature sizes, increased die and display size, 300-mm wafers,and mini-environment usage are making static charge control critical to improving yields and achieving high product throughput The most common methods of controlling static charge in clean-room production areas are grounding, material selection, and airionization.