The spectroenergetic characteristics of the plasma jet of a stopped-down discharge in vacuum

摘要

This paper presents the results of a study of the thermodynamic parameters of the plasma of a pulsed vacuum UV light source based on a stopped-down jet discharge. The character of the outflow of the high-temperature erosion products of the plasma-forming material of the stop in vacuum is established. The spectroenergetic characteristics of the radiation of the cathode jet in the vacuum-UV region (90-190 nm) are obtained in the gas-dynamic and magnetohydrodynamic flow regimes of the plasma at an interelectrode gap of decimeter size.