Investigation of the wear and corrosion behaviors of CrN films onto oxynitriding-treated AISI H13 alloy steel by the direct current magnetron sputtering process

摘要

In the research reported herein, CrN films were coated onto oxynitriding-treated AISI H13 alloy steel using direct current magnetron sputtering deposition technique. The AISI H13 substrate has a 50-mu m oxynitrided top layer with a hardness of 1000 HV0.05. The duration of the CrN film deposition were varied while the sputtering parameters were kept constant with constant bias of -25 V, power of 100 W, Ar and N-2 gas flow rate of 45 and 30 sccm, respectively, and deposition temperature of 300 ?. The duplex oxynitride/CrN coating exhibited optimal properties when the CrN film was 3.35 mu m thick after 2.5 h deposition. This sample showed good adhesion to the oxynitrided layer. It also had the best wear resistance with wear loss volume and specific wear rate was 5.38 x 10(-6) mm(3) and 1.35 x 10(-6) mm(3).m(-1).N-1, and good corrosion resistance with a corrosion current of 4.30 x 10(-5) A.cm(-2) and polarization resistance of 604.66 omega.cm(2). Overall, the CrN/oxynitriding duplex surface treatment is effective in improving the properties of oxynitrided AISI H13 alloy steel.