Laser Inspection for Visualizing Vibration in a Fine Structured Device

摘要

A real time optical metrology to detect nano-scale vibration on the surface of solid materials is presented. Comparing to the electric method checkable only whether the vibration occurred or not on the surface of device to be investigated. The real time optical metrology provides visual information how and where the vibration occurred in nano-scale. We propose a laser inspection method for real time visualizing any vibration on the surface of device or materials. The measuring limit and conditions to detect a small surface vibration are given with a function of speed and sensitivity of detector. The observed signals of interference and diffraction are analyzed by theoretical interpretation.