机译:Synthesis of titanium-oxide nanoparticles with size and stoichiometry control
Linkoping Univ, Plasma & Coatings Phys Div, IFM Mat Sci, S-58183 Linkoping, Sweden;
Linkoping Univ, Thin Film Phys Div, IFM Mat Sci, S-58183 Linkoping, Sweden;
Titanium dioxide; TiO2; Reactive sputtering; Size control; Composition control; Gas flow sputtering; Aerosols;