It is known that the siloxane gas influences the contact reliability. In the evaluation of the past when the silver contact was used, the trouble occurred in the area where the range of the load was limited The silicon deposit was not generated in ultra micro load and the mechanical opening condition. However, there is a possibility that the contact trouble occurs in a smaller load from the silver contact because activation energy decreases when the contact material with catalysis is used. The contact reliability in the micro load was evaluated by using the catalyst type contact in this report.
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