Development of precise XY-stage system for laser fine-cutting system

摘要

This paper presents a precise XY-stage system specially designed for laser fine cutting system. Analysis of dynamic behavior of the stage system, control system design arid some experimental results are described. The stage system is guided on a base plate by linear motion bearings and driven by simultaneous operation of three linear motors in the x-, y- and θ{sub}z directions. The manuscript discusses the design of control system providing precise motion accuracy, using a force disturbance observer and decoupling compensation based on analysis of stage dynamics. Experimental results indicate that the proposed servo control method successfully reduces trajectory error for some motion command.