Study of the resolution of direct recording of submicron structures on titanium films using millisecond laser pulses

摘要

The local laser oxidation of titanium thin films was simulated at submicron sizes of the irradiation region. Radial distributions of the film temperature, oxide layer thickness, and film transmittance were obtained, taking into account the temporal and spatial dependence of the film absorptivity on the thickness of the oxide layer formed. The calculation results revealed the conditions for achieving high resolution (a minimum size of a recorded image of 230 nm for the visible range) and high recording contrast simultaneously. The optimal ranges of radiation power density and film thickness were determined. (C) 2019 Optical Society of America