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Choosing the synthesis parameters of hologram-projectors for photolithography

机译:选择用于光刻的全息投影仪的合成参数

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This paper discusses features of the synthesis of hologram-projectors intended for use in a holographic version of the photolithographic process. The main attention is paid to how the discretization of the object and the hologram affects the structure of the reconstructed image. The requirements imposed on the calculational and display parameters of the synthesized holograms are formulated and substantiated. It is established that discretization of the synthesized holograms not only causes additional reconstructed images to appear but also restricts the minimum size of the elements of the reconstructed images to 1.5 lambda. (c) 2008 Optical Society of America.
机译:本文讨论了用于光刻过程的全息版本的全息投影仪的合成特征。主要关注对象和全息图的离散化如何影响重建图像的结构。制定并证实了对合成全息图的计算和显示参数的要求。结果表明,合成全息图的离散化不仅会导致出现额外的重建图像,而且还将重建图像元素的最小尺寸限制为 1.5 lambda。(c) 2008年美国光学学会。

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