MULTILAYER ARRAY ILLUMINATORS WITH BINARY PHASE PLATES AT FRACTIONAL TALBOT DISTANCES

摘要

We describe a Talbot array illuminator made of cascaded binary phase plates located at fractional Talbot distances. We compare the performance of such an illuminator with a conventional single-layer Talbot array illuminator in terms of compression ratio and technical feasibility. (C) 1996 Optical Society of America [References: 12]