MgO-Al↓(2)O↓(3)-ZrO↓(2) amorphous ternary composite:a dense and stable optical coating

摘要

The process-parameter-dependent optical and structural properties of MgO-Al↓(2)O↓(3)-ZrO↓(2) ternary mixed-composite material were investigated. Optical properties were derived from spectrophotometric measurements. The surface morphology, grain size distributions, crystallographic phases, and process-dependent material composition of films were investigated through the use of atomic force microscopy, x-ray diffraction analysis, and energy-dispersive x-ray analysis. Energy-dispersive x-ray analysis made evident the correlation between the optical constants and the process-dependent compositions in the films. It is possible to achieve environmentally stable amorphous films with high packing density under certain optimized process conditions. OCIS codes: 310.1620, 310.6860, 310.3840, 310.1860, 240.0310, 160.4670.