DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THICK TRANSPARENT FILMS BY VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY - APPLICATION TO BENZOCYCLOBUTENE FILMS

摘要

An analysis procedure for evaluating the refractive index and the thickness of 5-10-mu m-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in psi and Delta with respect to the refractive index and the thickness of the films are also discussed. (C) 1996 Optical Society of America [References: 7]