Straightness measurements with a reflection confocal optical system-an experimental study

摘要

Straightness measurement is an important technique in the field of mechanical engineering. We previously proposed a novel optical method for measuring straightness of motion using reflection confocal optics. The advantage of this method in comparison with the transmission optical systems of others [Opt. Laser Technol. 6, 166 (1974)] is that the lateral displacements in the two axes perpendicular to the optical axis and the rotation angles around all three axes can be measured simultaneously. We demonstrate straightness measurements using reflection confocal optics and show these measurements to be in good agreement with the theory.