High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm

摘要

We describe a high-temperature lithium extreme-ultraviolet (EUV) source based on a capillary discharge configuration that was developed for operating with metal vapors. The source produces narrow-band emission at 13.5 nm in the EUV spectral region, with emission intensity proportional to the lithium-vapor density. At an operating temperature of 725℃, our measurements showed that, on axis, the source generated approximately 0.2 (mJ/2π sr)/pulse at 13.5 nm.