机译：不断制造可伸缩的二维(2 d)微-纳米结构,顺序1 d机械模式流程
Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA;
Macromolecular Science and Engineering, University of Michigan, Ann Arbor, MI 48109, USA;
Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul, 139-743, Korea.;
Sequential; DNI; fabricationScalabilityNanostructure;
机译：纳米压印技术制备硅基有序一维、二维纳米结构 Fabrication of Si-Based 1D,2D Ordered Nano Structure by Nanoimprint Lithography
