Atomic MoS2 monolayers synthesized from a metal-organic complex by chemical vapor deposition

摘要

The controllable synthesis of MoS2 monolayers is the key challenge for their practical applications. Here we report the chemical vapor deposition (CVD) growth of single layered MoS2 by utilizing a bifunctional precursor. This precursor is a metal-organic complex which supplies both Mo sources and organic seeding promoters for the efficient CVD growth of MoS2 monolayers. The successful growth of high quality MoS2 flakes indicates that the rational design of bifunctional precursors will open up a new way for the controllable CVD growth of two-dimensional (2D) transition metal dichalcogenides (TMDCs).