Micro chemistry plant

摘要

Micro-Electro-Mechanical-System (MEMS) technology has been developed from semi-conductor silicon process and now is spreading its application to various fields. The micro total analysis system (micro TAS) is an application field of MEMS for chemical or bio engineering. This paper describes micro chemical devices in micro TAS, for example micro pump, micro valve and micro reactor. The concept of combinatorial chemistry composed of these devices is introduced.