New Compact SIMS for Mass Spectrometry in Solid Material

摘要

The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis. A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. The instrument has a small footprint and is exceptionally easy to use, it boasts the same control software and ion gun system as the fully featured Hiden SIMS Workstation family, providing depth profiles, 3D and 2D images and mass spectral data. The MAXIM-600P detector is based around the highly reliable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun option is available for analysis of insulating samples.