Investigation of atmospheric pressure plasma-jet system used for deposition of ZnO thin films

摘要

We report on the barrier-multi-torch plasma-jet system-the novel plasma deposition system capable of working at atmospheric pressure in open air. This system can be operated in continuous-wave mode as well as in pulse regime. In the paper we describe time evolution of light intensity during single impulse in the multi-torch plasma jet system recorded by digital cine camera. Plasma jet impedance in the active part of the impulse was determined by direct voltage and current measurements using digital phosphor oscilloscope.