Genetic algorithm approach to thin film optical parameters determination

摘要

Optical parameters of thin films are important for several optical and optoelectronic applications. In this work the genetic algorithm method is proposed to solve optical parameters of thin film values. The experimental reflectance is modelled by the Forouhi-Bloomer dispersion relations. The refractive index, the extinction coefficient and the film thickness are the unknown parameters in this model. Genetic algorithm use probabilistic examination of promissing areas of the parameter space. It creates a population of solutions based on the promissing areas of the parameter space. It creates a population of solutions based on the reflectance model and then operates on the population to evolve the best solution by using selection, crossover and mutation operators on the population individuals. The implementation of genetic algorithm method and the experimental results are described too.