Nanophotonic waveguide based on engineered horizontal-vertical slots for polarization independent bio-chemical sensing

摘要

A nanophotonic waveguide based on engineered horizontal and vertical slots is proposed. The proposed engineered structure is composed of three silicon ribs forming two vertical slots, and on top a gold cover in the shape of microchannel forms horizontal slot regions. We are able to increase the bulk sensitivity in TM mode by 1.5 times with the gold cover. The bulk sensitivity for TE and TM mode is reported to be 1.024 nm(-1) and 0.95 nm(-1), respectively. Surface sensitivity, investigated numerically, is 0.265 x 10(-2) RIU/nm for DNA hybridization and 2.3 x 2 pi/rad for hepatitis surface antigen detection. (C) 2021 Optical Society of America