Influence of noble gases on electron cyclotron heated hydrogen plasma

摘要

A quartz-chamber 2.45-GHz electron cyclotron resonance ion source (ECRIS) is designed at Peking University for the diagnostic purpose. Experimental results show that the added noble gases in hydrogen could cause a decrease of electron temperature and an increase of electron density. In this work, a numerical model is upgraded for ECR plasma generated by mixed gases. On this basis, the model is applied for the composed hydrogen plasma with additional noble gases. And dependences of neutral gas density and electron density on electron temperature are presented for individual gas (He, Ar, and H-2) and gas mixture, respectively. The calculated results are basically in accordance with the diagnostic results of ECRIS.