Growth and characterization of La_(0.8)Sr_(0.2)MnO_3/Pb(Zr_(0.2)Ti_(0.8))O_3/La_(0.8)Sr_(0.2)MnO_3 heterostructures for three-dimensional circuit studies

摘要

The structural and electronic properties of epitaxial colossal magnetoresistive oxide (CMR)/ferroelectric/CMR trilayers have been examined to investigate the feasibility of building all-oxide three-dimensional (3D) circuits. Epitaxial Pb(Zr_(0.2)Ti_(0.8))O_3 (PZT) films sandwiched by ultrathin La0.8Sr0.2MnO3 (LSMO) layers have been fabricated using off-axis magnetron sputtering, with high crystalline quality and smooth surfaces having been obtained. Both the top and bottom layers of LSMO exhibit CMR behavior.