Effect of misalignment and rarefaction effect on the comprehensive characteristic of MEMS gas bearing

摘要

Purpose - Owing to the development of the smaller-sized rotational machinery, the demand for the high-speed and low-resistance gas bearing increases rapidly. The research of micro gas bearing in the condition of rarefied gas state is still not satisfied. Therefore, the purpose of this paper is to present a numerical investigation of the effect of misalignment and rarefaction effect on the comprehensive performance of micro-electrical-mechanical system (MEMS) gas bearing.