Electron optics column for a new MEMS-type transmission electron microscope

摘要

The concept of a miniature transmission electron microscope(TEM)on chip is presented.This idea assumes manufacturing of a silicon-glass multilayer device that contains a miniature electron gun,an electron optics column integrated with a high vacuum micropump,and a sample microchamber with a detector.In this article the field emission cathode,utilizing carbon nanotubes(CNT),and an electron optics column with Einzel lens,made of silicon,are both presented.The elements are assembled with the use of a 3D printed polymer holder and tested in a vacuum chamber.Effective emission and focusing of the electron beam have been achieved.This is the first of many elements of the miniature MEMS(Micro-Electro-Mechanical System)transmission electron microscope that must be tested before the whole working system can be manufactured.