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Extraction of interference phase in frequency-scanning interferometry based on empirical mode decomposition and Hilbert transform

机译:基于经验模式分解和Hilbert变换的频率扫描干涉测量中干扰阶段的提取

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摘要

Nonlinear optical frequency scanning is inevitable in frequency scanning interferometry with tunable lasers and seriously reduces the accuracy of interference signal phase extraction. To address this, we propose a phase-extraction algorithm based on empirical mode decomposition and Hilbert transformation. The method can effectively eliminate the influence of the optical frequency scanning nonlinearity. The validity and stability of the method have been verified through simulations and experiments. Moreover, the single-cycle relative error of the phase between adjacent peaks and the standard deviation of the measurement system improved to 0.6% and 0.7 mu m, respectively, with a 5 MHz sampling rate. (c) 2018 Optical Society of America
机译:非线性光学频率扫描在频率扫描干涉法中不可避免,可调谐激光器,并严重降低干扰信号相位提取的精度。 为了解决这一点,我们提出了一种基于经验模式分解和HILBERT转换的相位提取算法。 该方法可以有效地消除光学频率扫描非线性的影响。 通过模拟和实验验证了该方法的有效性和稳定性。 此外,相邻峰之间的相位的单周期相对误差和测量系统的标准偏差分别以5MHz采样率分别提高到0.6%和0.7μm。 (c)2018年光学学会

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  • 来源
    《Applied optics 》 |2018年第9期| 共7页
  • 作者单位

    Xi An Jiao Tong Univ State Key Lab Educ Minist Modern Design &

    Rotor Bearing Syst Xian 710049 Shaanxi Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Educ Minist Modern Design &

    Rotor Bearing Syst Xian 710049 Shaanxi Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Educ Minist Modern Design &

    Rotor Bearing Syst Xian 710049 Shaanxi Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Educ Minist Modern Design &

    Rotor Bearing Syst Xian 710049 Shaanxi Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Educ Minist Modern Design &

    Rotor Bearing Syst Xian 710049 Shaanxi Peoples R China;

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  • 正文语种 eng
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