...
首页> 外文期刊>Applied optics >Comparison of envelope detection techniques in coherence scanning interferometry
【24h】

Comparison of envelope detection techniques in coherence scanning interferometry

机译:相干扫描干涉法中包络检测技术的比较

获取原文
获取原文并翻译 | 示例
   

获取外文期刊封面封底 >>

       

摘要

The aim of this work is to make a comparison of the most current signal processing techniques used to analyze the fringe signal in coherence scanning interferometry (CSI), a major technique for optical surface roughness measurements. We focus here on classical AM-FM signal-processing algorithms such as the Hilbert transform (HT), the five-sample adaptive (FSA), and the continuous wavelet transform (CWT). We have recently also introduced a new family of compact and robust algorithms using the Teager-Kaiser energy operator (TKEO). We propose an improved version of TKEO using a combination of different techniques of pre-filtering and demodulation processing to remove the noise and offset component and to retrieve the fringe envelope to either determine the surface height information or to separate adjacent transparent layers. In particular, as a pre-filtering approach, we have focused on empirical mode decomposition in combination with the Savitzky-Golay filter. An added Gaussian post-filtering is helpful for a precise peak extraction. The experimental results show that TKEO performs better than CWT in terms of computation time and provides a better surface extraction than HT and FSA. Results have been obtained on synthetic and real data taken from a layer of resin on a silicon substrate. (C) 2016 Optical Society of America.
机译:这项工作的目的是进行最电流信号处理技术的比较,用于分析相干扫描干涉测量中的边缘信号(CSI),是光学表面粗糙度测量的主要技术。我们专注于古典AM-FM信号处理算法,例如希尔伯特变换(HT),五样本自适应(FSA)和连续小波变换(CWT)。我们最近还推出了使用Teager-Kaiser能量操作员(Tkeo)的新系列紧凑型且强大的算法。我们使用不同的预滤波和解调处理的不同技术的组合提出了一种改进的TKEO版本,以去除噪声和偏移部件,并检索边缘包络以确定表面高度信息或分离相邻的透明层。特别是作为预滤波方法,我们专注于与Savitzky-Golay滤波器组合的经验模式分解。添加的高斯后滤波器有助于精确的峰提取。实验结果表明,在计算时间方面,TKEO比CWT更好地执行,并提供比HT和FSA更好的表面提取。在硅衬底上的树脂层采取的合成和实数据上获得了结果。 (c)2016年光学学会。

著录项

  • 来源
    《Applied optics》 |2016年第24期|共12页
  • 作者单位

    Univ Strasbourg CNRS ICube Lab 23 Rue Loess F-67037 Strasbourg France;

    Univ Strasbourg CNRS ICube Lab 23 Rue Loess F-67037 Strasbourg France;

    Univ Strasbourg CNRS ICube Lab 23 Rue Loess F-67037 Strasbourg France;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用;
  • 关键词

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号