Laser processing of alumina ceramic by a spatially superposing millisecond laser and a nanosecond laser with different beam shapes

摘要

Advanced combined pulse laser (CPL) processing technology with high processing efficiency is of interest for both academic and engineering prospects. However, the influence of the spatial superposition of the CPL on the processing quality is unclear. Here, we use a CPL composed of a nanosecond and millisecond laser with different beam shapes to drill alumina ceramic. Experimental and simulation results suggest that the CPL drilling process actively homogenizes the laser in the hole through multi-reflection of the laser, and thus holes with high circularity are obtained without the influence of the beam shape of the nanosecond laser. The research shows this to be a novel processing method, and that the processing quality is independent of the laser beam shape. (C) 2020 Optical Society of America