机译:使用外差干涉测量的10-PM级机械位移测量
Nagaoka Univ Technol Dept Mech Engn 1603-1 Kamitomioka Nagaoka Niigata 9402188 Japan;
Nagaoka Univ Technol Dept Mech Engn 1603-1 Kamitomioka Nagaoka Niigata 9402188 Japan;
Hanoi Univ Sci &
Technol Sch Mech Engn 1 Dai Co Viet Rd Hanoi Vietnam;
Nagaoka Univ Technol Dept Mech Engn 1603-1 Kamitomioka Nagaoka Niigata 9402188 Japan;
Nagaoka Univ Technol Dept Mech Engn 1603-1 Kamitomioka Nagaoka Niigata 9402188 Japan;