Design, Synthesis, and Evaluation of CF3AuCNR Precursors for Focused Electron Beam-Induced Deposition of Gold

摘要

The Au(I) complexes CF3AuCNMe (1a) and (CF3AuCNBu)-Bu-t (1b) were investigated as Au(I) precursors for focused electron beam-induced deposition (FEBID) of metallic gold. Both 1a and 1b are sufficiently volatile for sublimation at 125 +/- 1 mTorr in the temperature range of roughly 40-50 degrees C. Electron impact mass spectra of 1a-b show gold-containing ions resulting from fragmenting the CF3 group and the CNR ligand, whereas in negative chemical ionization of 1a-b, the major fragment results from dealkylation of the CNR ligand. Steady-state depositions from 1a in an Auger spectrometer produce deposits with a similar gold content to the commercial precursor Me2Au-(acac) (3) deposited under the same conditions, while the gold content from 1b is less. These results enable us to suggest the likely fate of the CF3 and CNR ligands during FEBID.