Surface conversion reaction and high efficient grinding of CVD diamond films by chemically mechanical polishing

摘要

The competitive growth of crystals results in a rough diamond film, which prevents CVD diamond films from reaching their full potential in devices requiring a smooth film. To address the issue, a high-efficiency grinding wheel is developed by adding titanium into the vitrified bond wheel. The polished films have been characterized by stylus profilometer, Scanning Electron Microscopy, X-ray diffraction and nanoindentation. The results indicate that the hardness of the polished diamond film with adhesion layer has been reduced to 1.85 GPa, which enables highly efficient removal rate using Al2O3 abrasive. The material removal rate could reach 120.2 mu m h(-1) due to the formation of graphite and carbides (TiC) during the polishing process.