Model kinetic plasmic chemical synthesis nitride covering form rapid plasma beam

摘要

The physical and mathematical model in order to receive nitrides coatings of vacuum ion-plasma method is created. The mathematical model account basic stage of multistage process: adsorption, desorption, dissociation, chemosorption, accommodation, ion sputtering, surface migration. The mathematical model permit find velocity of grown coating and its composition from basic physical parameters of vacuum ion-plasma process.